Expert Details

Expert in IC, Nano, MEMS, Solar, Photovoltaic, Optical Process, Device, Equipment & Technology Development

Expert ID: 729136 California, USA

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Atomic Layer Deposition (ALD): Helped Applied Materials develop and improve an ALD deposition system by effecting parametric and design changes and cost effectively improving the ALD film analysis in 9 weeks. Developed patented metalnitride barrier layer technology. Integrated ALD into device process.
Nanotechnology and Nanofabrication: Prof. Expert first applied his semiconductor process technology at UltraPhotonics; a nanotechnology optical device startup. There optical active nanomaterials were introduced between and in optical waveguids to build fast optical switching, filtering, multiplexing and other devices. He first introduced nanotechnology into the Curriculum of the University of Applied Sciences & Arts in Hannover in 2003 and conceived and modeled nanowire based devices and built a STM with his students. Under his supervision several thesis on nanoparticle generation by Laser ablation and on the analysis of magnetic nanoparticles were completed. Prof. Expert also served as the CTO of nanovelus, a startup which developed a patented system for the manufacture of monodisperse nanoparticles.
Semiconductor Wafer Processing: Prof Expert has over 15 years of applied semiconductor process, device, equipment and technology development in industry. During his industrial career he developed expertise in: Barrier layers, Bosch RIE process, product management, wafer bonding ALD, CMOS, CoSi2, TiSi2 CVD, device simulation, device physics, DRIE, fiber optics, front end, IP,MEMS, metrology, microelectronics, MOCVD, MOS, nanodots, nanomaterials nanoparticles, nanotechnology, nanowire, patents, photovoltaic, physics, plasma etch, process development, process integration, process simulation, project management, PVD, quantum dots, R&D, RIE, salicide, semiconductor equipment, semiconductor process, semiconductors, silicide, solar, start-ups, technology development, TiSi2, vertical nanowire based surround gate FET, VLS process, waveguides and wet etching.
Physics and Physics Teaching: Prof. Expert studied physics, physical chemistry and electrical engineering at Columbia University-NY, MIT-MA, Technical University of Munich-Germany and Heidelberg- Germany with his focus on solid state NMR, applied solid state physics and selective S&D metallization with TaSi2 LPCVD. After applying his expertise in the semiconductor industry for over 15 years, he became a Professor and taught applied physics, semiconductor and nanotechnology for over 15 years for TWNMT Consulting and at Universities.
As the Principal Consultant for TWNMT Consulting Prof. Expert
•Assists in semiconductor, MEMS, optical, solar and nanotechnology process, equipment and technology development such as: Nanoparticle synthesis, VLS nanowire growth, deep etch, ALD, MeN barriers, W CVD, solar technology, nanowire devices, optical sensors, PLCs, reactor configuration, process simulation, metrology.
•Conceived, planed, jumpstarted and completed a committed part of a now patented process to generate vertical nanowire based light pipes to photodiodes for Zena Technologies at Harvard CNS on a tight 2 months Consulting assignment.
•Helped Applied Materials develop and improve an ALD deposition system by effecting parametric and design changes and cost effectively improving the ALD film analysis in 9 weeks.
•Evaluates, review R&D proposals. Organize and give courses in semiconductor technology.
•Conducts comparative technology and market studies.
•Is responsible for budget, customer acquisition and operations.
•His clients are: ABB, Applied Materials, Center for Nanoscale Systems at Harvard University, European Commission, IC Semiconductor, Infineon, MicroConsult, nanovelus, NEAH Power, Novellus, Siemens, Siemens School of Microelectronics and Zena Technologies.

Principal Consultant and Managing Director:
TWNMT Consulting
Munich/Hannover/Fremont, CA,
2/1995 – 2/2001
8/2002 – present
•Assist in semiconductor, MEMS, optical, solar and nanotechnology process, equipment and technology development such as: Nanoparticle synthesis, VLS nanowire growth, deep etch, ALD, MeN barriers, W CVD, solar technology, nanowire devices, optical sensors, PLCs, reactor configuration, process simulation, metrology.
•Conceived, planed, jumpstarted and completed a committed part of a now patented process to generate vertical nanowire based light pipes to photodiodes for Zena Technologies at Harvard CNS on a tight 2 months Consulting assignment.
•Helped Applied Materials develop and improve an ALD deposition system by effecting parametric and design changes and cost effectively improving the ALD film analysis in 9 weeks.
•Evaluate, review R&D proposals.
•Organize and give courses in semiconductor technology.
•Conduct comparative technology and market studies.
•Responsible for budget, customer acquisition and operations.
•Clients: ABB, Applied Materials, Center for Nanoscale Systems at Harvard University, European Commission, IC Semiconductor, Infineon, MicroConsult, nanovelus, NEAH Power, Novellus, Siemens, Siemens School of Microelectronics and Zena Technologies.

Expert may consult nationally and internationally, and is also local to the following cities: San Jose, California - San Francisco, California - Sacramento, California - Oakland, California - Stockton, California - Fremont, California - Modesto, California - Salinas, California - Santa Rosa, California - Hayward, California

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Education

Year Degree Subject Institution
Year: 1991 Degree: Dr. rer. nat. Subject: Applied Physics Institution: Technical University of Munich - Germany
Year: 1986 Degree: Ph.D. All but Dissertation Subject: Applied Physics and Electrical Engineering Institution: Columbia University - NY
Year: 1982 Degree: MS Physics Subject: Physics (Physical Chemistry) Institution: Massachusetts Institute of Technology
Year: 1979 Degree: Diploma Subject: Physik (Chemistry and Mathematics) Institution: Heidelberg University - Germany

Work History

Years Employer Title Department Responsibilities
Years: 1995 to Present Employer: Undisclosed Title: Principal consultant and Manging Director Department: Responsibilities: •Assist in semiconductor, MEMS, optical, solar and nanotechnology process, equipment and technology development such as: Nanoparticle synthesis, VLS nanowire growth, deep etch, ALD, MeN barriers, W CVD, solar technology, nanowire devices, optical sensors, PLCs, reactor configuration, process simulation, metrology.
•Conceived, planed, jumpstarted and completed a committed part of a now patented process to generate vertical nanowire based light pipes to photodiodes for Zena Technologies at Harvard CNS on a tight 2 months Consulting assignment.
•Helped Applied Materials develop and improve an ALD deposition system by effecting parametric and design changes and cost effectively improving the ALD film analysis in 9 weeks.
•Evaluate, review R&D proposals. Organize and give courses in semiconductor technology.
•Conduct comparative technology and market studies.
•Responsible for budget, customer acquisition and operations.
•Clients: ABB, Applied Materials, Center for Nanoscale Systems at Harvard University, European Commission, IC Semiconductor, Infineon, MicroConsult, nanovelus, NEAH Power, Novellus, Siemens, Siemens School of Microelectronics and Zena Technologies.
Years: 1996 to 2012 Employer: University of Applied Sciences & Arts Hannover Title: Professor Department: Electrical Engineering and Information Technology Responsibilities: •Teach physics, math, and semiconductor and nanotechnology classes. •Supervise thesis, labs, projects and internships on: Nanowire based vertical surround gate FETs, STM, monodisperse nanoparticle synthesis by Laser induced activation and ablation and nanoparticle based PV technology. CO-OP as CTO nanovelus Hannover, Germany 1/2006 – 8/2007 Develop IP and novel Laser based metal-organic (MO) based processes and equipment for quantum dot and nanoparticle synthesis. SABBATICAL as Principal Engineer: UltraPhotonics Fremont, CA 10/2001 – 7/2002 • Develop a waveguide process for nano technology based optical components and lead the process team. •Coordinate interaction between R&D and Manufacturing. •Determine type of and feasibility for future company products. •Reported directly to VP of product development. SABBATICAL as Principal Member of Technical Staff: Advanced Integrated Photonics/AIP Networks Fremont, CA 2/2001 – 9/2001 •Searched, negotiated and closed deal for foundry with dedicated clean room. •Selected and negotiated the purchase and sale of equipment placed in the clean room. •Transferred processes developed at Stanford and Berkeley to 6’’ Foundry. •Was in charge of STS DRIE etcher, EVG backside aligner and bonder. •Took responsibility and implemented a QC procedure for the MEMS process. •Designed a lens array to facilitate fiber alignment for collimated light beams. •Reported directly to the CEO.
Years: 1994 to 1995 Employer: Varian/TEL GmbH Title: Account Manager and Product Manager Department: Europe Responsibilities: • Product management for Varian and TEL equipment in Europe.
•Technical, applications and sales management of several large European customer and US accounts.
•Responsible for $15 millions in sales.
•Presented applications, products and quotes of the Varian/TEL product lines to customers.
•Conduct technical, environmental, safety and sales negotiations and closings.
•Developed marketing & sales strategies.
•Identified customers and analyzed sales potential.
•Related new system features desired by the customer back to the product lines.
•Introduced new product and R&D developments to strategic costumers.
•Reported directly to Manager Europe and VP.
Years: 1992 to 1994 Employer: Advanced Micro Devices GmbH Title: Field Applications Engineer Department: Europe Responsibilities: •Introduced new products to and designed AMD devices into strategic OEM’s products.
•Supported AMD´s European Applications Department and Technical Hot-Line for English, German and French speaking customers.
•Developed and applied product marketing strategies.
Years: 1986 to 1991 Employer: SIEMENS AG Title: Senior Principal Scientist Department: CORPORATE RESEARCH & DEVELOPMENT Responsibilities: •Developed novel self aligned LPCVD metallization process for S & D metallization and determined optimum process conditions by statistical design. Built working MOS devices.
•Designed BiCMOS library cells on a symbolic design system and simulated with SPICE. Designed a CMOS operational amplifier for 3 V operation on a VALID system.
•Supervised several engineers and students.
Years: 1983 to 1986 Employer: AT&T BELL LABORATORIES Title: Member of the Technical Staff Department: Device Capability Lab Responsibilities: •Developed and characterized TiSi2 Salicide process in parallel to CoSi2 Salicide.
•Developed doped SiO2 LPCVD processes for low temperature flow, transferred process to a pilot line and AT&T’s device capability lab and directed equipment installation.
•Determined and characterized stress, flow interface states and segregation properties of doped LPCVD and plasma SiO2 deposited from organic or inorganic source materials.
•Was responsible for several CVD and sputter deposition processes.
•Pioneered the Factorial Method for CVD process improvement.
•Supervised up to 12 engineers and operators.
Years: 1982 to 1983 Employer: THERMCO PRODUCTS CORPORATION Title: Project Scientist and Project Leader Department: R&D Responsibilities: •Developed various dry downstream photoresist strippers.
•Designed a novel PECVD system and functioned as the Project Leader for the development of this system.
•Developed and explained the physics of a novel piezoelectric flow controller.
•Developed a TEOS silicon oxide deposition process for customer demo.
•Conducted process and equipment related market research.
•Supervised several engineers and operators.

Government Experience

Years Agency Role Description
Years: 1995 to Present Agency: European Commission Role: Technical Expert Description: Reviews and recommends research proposals by European Consortia.

International Experience

Years Country / Region Summary
Years: to Present Country / Region: Germany Summary:
Years: to Present Country / Region: France Summary:
Years: to Present Country / Region: Switzerland Summary:
Years: to Present Country / Region: UK Summary:
Years: to Present Country / Region: The Netherlands Summary:

Career Accomplishments

Associations / Societies
Institute of Electrical and Electronic Engineers,
The Electrochemical Society,
SPIE, OSA
MIT Alumni
Fulbright Alumni Association
TUM Alumni Association
Professional Appointments
Professor at the University of Applied Sciences and Arts Hannover.
Awards / Recognition
Fulbright Scholar to study at MIT.
Medical / Professional
CO-OP as CTO
nanovelus
Hannover, Germany
1/2006 – 8/2007
Develop IP and novel Laser based metal-organic (MO) based processes and equipment for quantum dot and nanoparticle synthesis.

SABBATICAL as Principal Engineer:
UltraPhotonics
Fremont, CA
10/2001 – 7/2002
• Develop a waveguide process for nano technology based optical components and lead the process team.
•Coordinate interaction between R&D and Manufacturing.
•Determine type of and feasibility for future company products.
•Reported directly to VP of product development.

SABBATICAL as Principal Member of Technical Staff:
Advanced Integrated Photonics/AIP Networks
Fremont, CA
2/2001 – 9/2001
Publications and Patents Summary
He has widly published in peer review papers and holds several patents.

Additional Experience

Expert Witness Experience
Reviewed and recommended consortia research proposal as Technical Expert for various organizations in the European Union.
Training / Seminars
Expert developed and gave courses on principal semiconductor technology, semiconductor process technology and company specific process integration technologies for various CMOS and BiCMOS nodes to train semiconductor process and equipment engineers. These trainings were also attended by Field Service, Field Application, Product Engineers and Sales and Marketing Staff.
At the University he developed and taught courses in physics, EM field theory, quantum mechanics, semiconductor technology, nanotechnology and mathematics.
Vendor Selection
He negotiated semiconductor equiment purchases and sales, service contracts and technical equipment configurations while employed by semiconductor companies and equipment manufacturers. He was also negotiated Foundry deals, and he setup and ran process in foundries. He was also responsible for outsourcing of MEMS and semiconductor processes.
Marketing Experience
Expert teaches Physics, Semiconductor and Nanotechnology at the University of Applied Sciences and Arts in Hannover since 1996. His industrial career spanned from Varian/TEL, AMD, SIEMENS Corporate R&D, AT&T Bell Labs to Thermco Products Corp. where he developed new processes, equipment, technologies and IC applications for the IC industry.
As a consultant he now develops nanotechnology, MEMS, optical, solar and semiconductor process, equipment and technology such as: Nanoparticle synthesis, VLS nanowire technology, ALD, MeN barriers, W CVD, solar technology, optical sensors, planar waveguide circuits, reactor configuration, process simulation and metrology. He evaluates, review R&D proposals and organize and give courses in semiconductor and nanotechnology. He also conducts comparative technology and market studies.
Other Relevant Experience
Expert has completed a Practitioner and a Master Practitioner in NLP and has Coaching experience.

Language Skills

Language Proficiency
German Native speaker.
French Grew up on the French/German border.
English Was schooled in the US and lived here for over 15 years.

Fields of Expertise

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