Expert in Semiconductors, Analytical Chemistry, Surface Analysis, Gases, Chemicals, Business Development, Nanotech, Cleanrooms, Particles, IAQ, Business Development, Failure Analysis
Expert ID: 738457 California, USA
Areas of Expertise:
Semiconductors, Analytical chemistry, thin films, gases, chemicals, electronic specialty gases, cleanrooms, indoor air quality, business development, nanotech
Chemistry, chemicals, R&D, analytical chemistry, materials selection, method development, hardware development, contamination control, surface analysis, cleanrooms, support for semiconductors, microfluidics, photonics, packaging, nanotech
|Year: 1986||Degree: Postdoctoral Fellow||Subject: Bioinorganic chemistry, organic synthesis, spectroscopy, metalloporphyrins, NMR||Institution: University of British Columbia|
|Year: 1983||Degree: Ph.D.||Subject: Chemistry||Institution: University of California, Berkeley CA|
|Year: 1978||Degree: SB (BS)||Subject: Chemistry||Institution: Massachusetts Institute of Technology (MIT), Cambridge MA|
|Years: 2021 to Present||Employer: Undisclosed||Title: CEO, consultant, chemists, scientist, technologist||Department: CEO|
Responsibilities:● Consulting for hitech, instruments, analytical chemistry, microfluidics, MEMS, photonics, business development.
● Support for labs, fabs, startups, VCs, Angels
|Years: 2001 to 2020||Employer: Air Liquide Electronics - Balazs NanoAnalysis||Title: Senior Technical Advisor||Department: Technology, R and D|
Responsibilities:● Analytical chemistry from parts per trillion to 100% for water, chemicals, reagents, polymers, vials, air, cleanrooms, particles, disposables, gloves, wipes, packaging, surface analysis, particle counts and ID
● Method development for sampling including air, gases, corona ionizers, surfaces, wafers, optics.
● Support of Air Liquide Electronics worldwide and clients, also Airgas, Calgas and especially Balazs NanoAnalysis clients for our labs in Fremont CA, Dallas TX, Austin TX, France, Taiwan.
● Worked with fabs like Intel, Samsung, TSMC, Micron, Global Foundries, ST Microelectronics and MEMS mfgs like Analog Devices, Texas Instruments, disk drive companies like WD, Seagate, Headway, detector companies like dPix, GE, Raytheon, MITLL, wafer suppliers like REC, Sumco, MEMC, Siltronic, PV companies like Solyndra (bk), NanoSolar (bk), Suniva (bk) flat panel display mfgs, electrochromics like View, X-ray backplanes, IR focal plane arrays, HgCdTe, detectors, GaAs, III-V.
● Business trips to fabs in Korea, Italy, France, Ireland, Thailand, Malaysia, Singapore, Taiwan
● DNA chips, diagnostic, photonics, lasers, instrument manufacturers incl companies and/or suppliers such as Pacific Biosystems, Illumina, Applied Biosystems, ThermoFisher, PARC, MKS Instruments, PE Optoelectronics, SUNY, Varian, Coherent, Spectra Physics.
● Work for fab equipment mfgs and suppliers including LAM, Applied Materials, TEL (Tokyo Electron), Nikon, ASML, Cree, LumiLEDS, electronics companies like Apple, Cisco, Data Centers
● Worked with suppliers of gases, filters, purifiers, calibration gases, regulators.
● Participated in standards groups including SEMI, ASTM, MSIG (MEMS and Sensors Industry Group), IEST (Cleanrooms, pharmed, biomed, contamination control), IEEE-IRDS including for cleanrooms, water, gases, surface analysis, lithography.
● Solved contamination issue for one fab in US that caused up to 10% yield loss for one year due to P doping from outgassing of new HEPA filters. Published paper, with written permission from client, who chose to remain anonymous. Recommended they add C filters to air system to remove P compounds and this solved their yield problem.
● Solved fab issues with HF leaks that drastically curtailed yield for one large TX fab. Also helped one CA fab post 200 gallon HF leak that degraded HEPA filters and equipment.
● Assisted fabs to assess contamination due to fires, floods, spills
● Expertise in GC-MS, ICP-MS, FTIR, Raman, UV-Vis, NMR, XRF, SEM-EDS, microscopy, NDIR, CRDS, UV-FL, gloveboxes, environmental test chambers, indoor air quality.
|Years: 1987 to 2001||Employer: Balazs Analytical Laboratory||Title: Sr. Research Chemist||Department: R and D, Environmental lab directors, special projects, organic lab manager|
Responsibilities:● Set up environmental lab and got certified 1989 for CA state for analysis of drinking water, wastewater, including for trace metals, organics
● Learned GC-MS, ICP-MS, Ion Chromatography
● Studied instruments with clients including multiple ultrapure water systems, online analyzers including sodium, TOC (Total Oxidizable Carbon).
● Invented Total oxidizable carbon methods for chemicals and modified instrument substantially for TOC in H2SO2, HF, HNO3, H3PO4, H2O2, NaOH, NH4OH, KOH, No other labs offered this. Wrote papers, presented talks,
● Supported NASA, cleanrooms, Mars mission, Genesis mission, toured NASA Johnson Space center cleanrooms, and made recommendations
● Audited semiconductor factories including 4 in Dallas TX for airborne contamination issues in cleanrooms, and troubleshooting for process problems, and helped other fabs in Oregon, Arizona. Gave talks to 14 companies in Asia, 5 countries in 14 days in 2000. Gave up to 3 hour talks.
● Developed methods for trace contamination analysis for hydrogen peroxide including using GC-MS
● Wrote IEST standard for outgassing of cleanroom components, RP31
● Worked in SEMI standards including for cleanrooms including SEMI F21 for Airborne Molecular Contamination
● Helped troubleshoot wetting issues for diagnostics including capillary electrophoresis, due to outgassing of packaging
|Years: 1986 to 1987||Employer: Salutar (later sold to Nycomed)||Title: Research Chemist||Department: R and D|
Responsibilities:● Developing 99Tc imaging agents for Alzheimers, incl organic synthesis and Scintillation counting. Then transferred to supporting the first MRI (Magnetic Resonance Imaging) contrast agents based on Fe, Mn, Gd chelates. Gd compounds are still commonly used for MRI contrast enhancement.
|Years: 1983 to 1986||Employer: University of British Columbia, Vancouver BC Canada||Title: Post Doctoral Fellow, Bioinorganic chemistry group||Department: Chemistry|
Responsibilities:Synthesis of ruthenium dodecacarbonyl = Ru3(CO)12, synthesis of 5,10,15,20-tetramesityl porphyrin (TMPH2), metalation to form Ru(CO)TMP, UV photolysis in acetonitrile to make Ru(CH3CN)2TMP, vacuum pyrolysis to make "bare" 14-electron RuTMP, reaction with N2 to instantly form Ru(N2)2TMP. Crystal structure done by others for Ru(THF)N2TMP. FTIR, NMR. Metalloporphyrin phosphine decarbonylation of benzaldehyde. Oversaw lab safety for 16 people. Worked with Professors David Dolphin and Brian James.
|Associations / Societies|
|ACS member since 1979
ASTM member since approx 1989, including for Air, water, electronics
SEMI Standards member since approx 1992
SEMI MSIG, MEMS/Sensors Industry group member since 2020
IEEE-IRDS: International Roadmap for Devices and Systems (was previously IRDS), Yield Enhancement team member
IEST: Institute of Environmental Sciences and Technology, cleanroom standards including RP12 design of cleanrooms, RP16 Non-volatile residue, RP 31 outgassing of cleanroom materials, RP35 cleanroom design considerations for Airborne Molecular Contamination, and other standards at times on gloves, wipes, disaster recovery planning, IEST 1246 on contamination.
Participant in Chemical Angels Network, 2020-present
Bio2Device Group, participant at times, Palo Alto, but now virtual talks.
|Licenses / Certifications|
|ACS Certified Chemist 1978|
|Awards / Recognition|
|- Robert Mielke award by IEST.org
- Air Liquide Electronics, International Sr Expert in Electronics for work in analytical chemistry for semiconductor fabs, presented in Paris, France
|Publications and Patents Summary|
|Zero Patents, but about 20 publications incl in Inorganic Chemistry, Semiconductor International, Micro Magazine. Most recently, mainly gave talks at conferences, for example:
NEBB Talk, Beyond Particles
|Training / Seminars|
|Have over 15 thousand Linkedin 1st connections, mostly very technical including semiconductors, air, gases, cleanrooms, water, chemistry, chemicals.|