Expert Details

Expert in Thin Film Deposition, Chemical Mechanical Polishing, Semiconductor Process Integration

Expert ID: 724157 Illinois, USA

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Expert has 10 years of experience developing consumable products and processes for application in chemical mechanical polishing. He holds approximately ten patents and patent applications on consumables and processes for chemical mechanical polishing. The expert has intimate knowledge of chemical mechanical polishing processes and applications in a variety of areas including: copper, tantalum, tungsten, and interlayer dielectric CMP. Many of the products he has developed have had significant commercial success.

Expert has 8 years of experience leading and contributing to product and process development efforts. This experience has been primarily in products for chemical mechanical polishing and thin film processes for metal deposition targeted at improved corrosion and erosion resistance. The expert has also led the technical aspects of product development for an information-based product. The expert is experienced in all aspects of new product development including: protection of intellectual property through patents and trade secret protection, licensing of intellectual property, supplier selection, outsourcing technical resources, initial concept selection, design of experiments, stage gate processes, six sigma methods, and technology transfer to pilot and high volume manufacturing.

Expert has 5 years of experience deposition and characterizing II-VI and analog I-III-VI semiconductor materials. The expert has authored several peer-reviewed publications on the subject of electronic transport, diffusion, and doping in CuInGaSe2. He is experienced with a variety of characterization techniques for these and other materials including: temperature dependent Hall effect, SIMS, XRD, photoconductivity, photoluminescence, SEM, EDS, etc.

Expert has more than 5 years of experience depositing thin film materials including ceramics (Al-doped ZnO
and Li conducting ceramics), metals (Ti, TiN, Al, Mo, Au, and others), as well as selinide materials. The majority of
his thin film deposition experience has been using sputtering and evaporation techniques including those techniques
using a reactive atmosphere. However, he also has some experience producing monolayer films using self-
terminating reactions from liquids. Expert is currently engaged in research projects using physical vapor
deposition to produce complex oxide ceramics for use as Li-ion conductors.

He has identified the technical root causes of several product failures in support of litigation.He has worked on-site with a client to develop a metal surface treatment technology which resulted in samples which exceeded the client's customer expectations. Expert has developed and delivered technical presentations to prospective funders. Several of these, for different clients, have resulted in offers of funding. Expert has conducted literature searches and reviews on stress corrosion cracking of various materials and on inter-metallic phase formation to direct technical projects and constructed research proposals for government funding.

Expert may consult nationally and internationally, and is also local to the following cities: Chicago, Illinois - Rockford, Illinois - Aurora, Illinois - Naperville, Illinois - Peoria, Illinois - Joliet, Illinois - Elgin, Illinois - Milwaukee, Wisconsin - Kenosha, Wisconsin - Gary, Indiana

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Education

Year Degree Subject Institution
Year: 1997 Degree: PhD Subject: Materials Science and Engineering Institution: University of Illinois at Urbana-Champaign
Year: 1995 Degree: MS Subject: Materials Science and Engineering Institution: University of Illinois at Urbana-Champaign
Year: 1992 Degree: BS Subject: Ceramic Engineering Institution: University of Illinois at Urbana-Champaign

Work History

Years Employer Title Department Responsibilities
Years: 2008 to Present Employer: Undisclosed Title: Associate Professor Department: Engineering Technology Responsibilities: Expert conducts research in collaboration with Argonne National Laboratory to enable the use of lithium metal anodes for secondary batteries. This work involves developing ceramic Li-ion conductors that are stable to lithium metal while simultaneously having sufficient conductance to allow use in vehicle applications. He also works on various projects focused on energy use and energy efficiency
Years: 2006 to Present Employer: Undisclosed Title: Consultant Department: Responsibilities: Expert has provided technical leadership to develop a proprietary metal surface alloying technology. He has served as a technical expert representative of the companies to potential and current customers as well as assembling and presenting technology to potential investors from individual angel investors to large corporate investors.
Years: 1999 to 2007 Employer: Cabot Microelectronics Title: Senior Scientist Department: Research and Development Responsibilities: Expert was responsible for leading teams of scientists and engineers to develop new technologies and products for chemical mechanical polishing of surfaces used in semiconductor manufacturing.
Years: 1997 to 1999 Employer: Motorola Title: Process Development Engineer Department: Semiconductor Products Sector Responsibilities: Develop processes for the manufacturing of integrated circuit devices.

International Experience

Years Country / Region Summary
Years: 2001 to 2001 Country / Region: Taiwan Summary: Expert took a technical team to work directly with an integrated circuit manufacturer in Taiwan to develop a customer specific polishing formulation for the customer.
Years: 2001 to 2003 Country / Region: Taiwan Summary: Supported research and development with a major semiconductor manufacturer as well as gathering technical marketing data.
Years: 2005 to 2006 Country / Region: Korea Summary: Made multiple trips to build a relationship and discuss a new technology with a major chemical manufacturer.

Career Accomplishments

Awards / Recognition
Cabot Microelectronics Presidents Award;
Cabot Microelectronics Patent of the Year Award
Publications and Patents Summary
He has more than 15 publications and 10 patents.

Additional Experience

Expert Witness Experience
This expert has experience performing root cause investigations in support of litigation.
Vendor Selection
Expert has experience locating and working with suppliers of analytical services, custom polymers, and nano-particles.
Marketing Experience
Expert has extensive experience presenting technologies and product data to customers in the United States, Europe, and Asia. Expert is experienced at delivering presentations to potential investors in technology start-up companies. Expert has been the lead technologist for several successful product releases.
Other Relevant Experience
Expert is experienced at developing thin film deposition processes for metals and semiconductors as well as characterization of thin films.

Fields of Expertise

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