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Semiconductor Back End of Line Processes, Process and Thin Films Characterization, Film Stresses and Reliability. PVD, ALD, CVD, HiPIMS
Back-End-of Line (BEOL) Integration in SRAM, Spin-Torque, Resistive Random Access Memory. PVD, CVD and ALD thin film deposition. Film micro-structure and properties. Stress-related problems in BEOL. DC, RF and HiPIMS sputter deposition. Arc evaporation. Plasma-Surface interactions. 13 years academic experience…
Magnetron Cathode Design, Magnetic Field Modeling, PVD, Sputtering, Ion Beam Etch, Vacuum Technology
Expert has developed and supported production thin film sputtering systems and processes since 1989. He has led the development and deployment of a production PVD cluster tool used by the IC, MEMS, and magnetic memory industries. He developed one of…
Nanomanufacturing Processes
Expert has 20 + years of experience in technical and business aspects of nanomanufacturing. He has been involved in the implementation of thin film technologies in various devices such as semiconductors, sensors, magnetic recording heads, displays (OLEDS,TFT),HB-LED, photovoltaics (CIGS,..) EUV…
Thin Film Deposition, Specializing in Reactive Sputtering
Expert D. Expert has extensive experience in magnetron sputtering of aluminum and in the high-rate reactive sputtering of aluminum compounds such as aluminum oxide. He was the first to show that aluminum oxide with excellent film properties can be reactively…