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Thin Films, PVD, Magnetron Sputtering, Reactive Sputtering
Expert received his M.S. in Electrical Engineering from Radio-Engineering University (Ryazan, Russia) and his Ph.D. in Materials Science from the Institute of High-Current Electronics (Tomsk, Russia). Expert has four decades of wide-ranging Physical Vapor Deposition (PVD) experience, particularly in reactive…
Thin Film Deposition, Specializing in Reactive Sputtering
Expert D. Expert has extensive experience in magnetron sputtering of aluminum and in the high-rate reactive sputtering of aluminum compounds such as aluminum oxide. He was the first to show that aluminum oxide with excellent film properties can be reactively…
Semiconductor Back End of Line Processes, Process and Thin Films Characterization, Film Stresses and Reliability. PVD, ALD, CVD, HiPIMS
Back-End-of Line (BEOL) Integration in SRAM, Spin-Torque, Resistive Random Access Memory. PVD, CVD and ALD thin film deposition. Film micro-structure and properties. Stress-related problems in BEOL. DC, RF and HiPIMS sputter deposition. Arc evaporation. Plasma-Surface interactions. 13 years academic experience…
Thin Film Science, Magnetron Sputtering
Academic, R&D and industrial production experience of 20+ years in thin films: deposition (mostly magnetron sputtering, roll-to-roll R2R), in-situ/ex-situ characterization, mechanics (stress, delamination, cracking), optical properties, post-treatment. Senior engineer in the field of thin films and nanostructures I have accumulated…
Failure Analysis for Glass, Porcelain, and Metals; Accident Reconstruction
Expert possesses over 25 years' consulting experience pertaining to metallurgy, materials, accident reconstruction, product liability, OSHA worker safety, intellectual property, factory safety and other related fields. In this capacity, his client base has primarily been comprised of attorneys, and his…
Electronic Material Processing, Chemical-Physical Analysis, Device Modeling, Biomedical Sensors
Expert has over thirty years experience in the design, micro-fabrication, analysis and modeling of electronic devices, transistors, and sensor arrays. He has extensive experience with the advanced processes for device fabrication: depositing the metal electrode and contact layers by sputtering,…
Plasma Cleaning and Treatment, Plasma sources (Magnetron, Hollow cathode, DBD amd others), Medical devises, Metals, Polymers, Thin Film and Surface Technologies, Deposition by Sputtering
Expert is the president of a consulting firm. He has more than 20 years of experience in industrial research and development and more than 30 years experience in academia. He worked for BOC Coating Technology investigating and developing vacuum and…
Magnetron Cathode Design, Magnetic Field Modeling, PVD, Sputtering, Ion Beam Etch, Vacuum Technology
Expert has developed and supported production thin film sputtering systems and processes since 1989. He has led the development and deployment of a production PVD cluster tool used by the IC, MEMS, and magnetic memory industries. He developed one of…
Microelectronics, Nanotechnology, Semiconductors, Memory
Expert has nearly 10 years of experience in solid state device development in a wide range of material systems. As a senior process engineer at Global Communication Semiconductors, he has provided internal advice about epitaxial layer selection from different compound…
Optical Coatings, Vacuum Engineering, Ion Beam and Sputtering Technologies and Equipment
ExpertChutko has 38 years experience in optical coating, vacuum engineering, ion beam sources and their applications. He managed coating labs in Russia and USA producing a wide range of optical coatings; developed, designed and manufactured technological ion sources for ion…