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Magnetron Cathode Design, Magnetic Field Modeling, PVD, Sputtering, Ion Beam Etch, Vacuum Technology
Expert has developed and supported production thin film sputtering systems and processes since 1989. He has led the development and deployment of a production PVD cluster tool used by the IC, MEMS, and magnetic memory industries. He developed one of…
Vacuum and Electrochemical Based Surface Treatment, Management, Production and Development
Expert has over the most recent years been the lead on development of : filtered arc equipment, ta-C coatings produced in filtered arc equipment, application development for ta-C films, IP covering equipment, coatings and applications -and holds several patents in…
Thin Film Deposition, Specializing in Reactive Sputtering
Expert D. Expert has extensive experience in magnetron sputtering of aluminum and in the high-rate reactive sputtering of aluminum compounds such as aluminum oxide. He was the first to show that aluminum oxide with excellent film properties can be reactively…