Expert Details

Expert in Microelectromechanical Systems (MEMS), Microfabrication

Expert ID: 108243 Virginia, USA

Request Expert

MICROELECTROMECHANICS; MICROMACHINES; MICROELECTROMECHANICAL SYSTEMS. Expert has microelectromechanical systems (MEMS) as his primary research area. He is primarily concerned with the development of micromachines and related technologies for electronic, biomedical, and industrial applications.

MICROFABRICATION; MICROMACHINING; SILICON MICROMACHINING. Expert has had over 17 years of experience in microfabrication. This includes multiproject integrated circuit manufacture, process integration, and silicon micromachining. He is currently involved with new process technology development for microelectromechanical systems. These include thin film piezoelectric actuators and fabrication of high aspect ratio microstructures.

MEMS FABRICATION. Expert is the developer of several innovative technologies for the fabrication and application of microelectromechanical systems. These systems include micromechanical fastening systems ("micro-velcro") for joining biologic tissues; devices to inject DNA into cells; sputter deposition of piezoelectric thin films; high-aspect-ratio microstructures using anodic metal oxides; integrated MEMS using foundry supplied CMOS chips and post-processing; control of liquid bridging induced stiction using geometric tabs in released structures.

Expert may consult nationally and internationally, and is also local to the following cities: Richmond, Virginia - Alexandria, Virginia - Roanoke, Virginia - Lynchburg, Virginia

Request Expert


Year Degree Subject Institution
Year: 1987 Degree: PhD Subject: Electrical Engineering Institution: Stanford University
Year: 1980 Degree: MEng Subject: Electrical Engineering Institution: Rensselaer Polytechnic Institute
Year: 1979 Degree: BS Subject: Electrical Engineering Institution: Rensselaer Polytechnic Institute

Work History

Years Employer Title Department Responsibilities
Years: 1997 to Present Employer: Undisclosed Title: Professor of Electrical Engineering and Biomedical Engineering Department: Responsibilities:
Years: 1993 to 1997 Employer: Carnegie Mellon University Title: Associate Professor Department: Responsibilities:
Years: 1996 to 1996 Employer: Swiss Federal Institute of Technology, Zurich Title: Visiting Professor Department: Responsibilities:
Years: 1994 to 1994 Employer: University of Twente, The Netherlands Title: Visiting Researcher Department: Responsibilities:
Years: 1987 to 1993 Employer: Carnegie Mellon University Title: Assistant Professor Department: Responsibilities:
Years: 1983 to 1987 Employer: Stanford University Title: Research Assistant Department: Responsibilities:
Years: 1980 to 1983 Employer: Hewlett-Packard Laboratories Title: Technical Staff Department: Responsibilities:
Years: 1981 to 1983 Employer: Mission College Title: Instructor Department: Responsibilities:

International Experience

Years Country / Region Summary
Years: 2000 to 2000 Country / Region: Germany Summary: Visiting Professor, Institute for Microsystem Technology, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
Years: 1996 to 1996 Country / Region: Switzerland Summary: Visiting Professor, Physical Electronics Laboratory, ETH Zürich, Zürich, Switzerland
Years: 1994 to 1994 Country / Region: Netherlands Summary: Visiting Researcher, MESA Research Institute, University of Twente, Enschede, The Netherlands

Career Accomplishments

Associations / Societies
Expert is a member of the American Physical Society, a Senior Member of the IEEE, and a Fellow of the Institute of Physics.
Professional Appointments
He was the General Co-Chairman of the 1996 IEEE MEMS Workshop, and is Associate Editor of the journal Sensors and Materials.
Awards / Recognition
He has received many awards, including the Hertz Foundation Doctoral Thesis Prize (1988) and Presidential Young Investigator (1989).
Publications and Patents Summary
He is the author of more than 50 scientific articles and books. He has seven issued patents and one textbook on circuit analysis.

Fields of Expertise

Request Expert

Dev Tool:

Request: expert/microelectromechanical-systems-mems-microfabrication
Matched Rewrite Rule: expert/([^/]+)(?:/([0-9]+))?/?$
Matched Rewrite Query: experts=microelectromechanical-systems-mems-microfabrication&page=
Loaded Template: single-experts.php