Expert Details

Expert in Thin Film Science and Technology

Expert ID: 107921 Georgia, USA

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THIN FILM APPLICATIONS; THIN FILM INTEGRATED CIRCUIT. The majority of Expert's academic, industrial, and research experience has been thin film science and technology. Although most of his experience has been in the microelectronics (semiconductor) industry, he has applied his knowledge to many industries that utilize films and coatings (solar cells, flat panel displays, and corrosion). His work has focused on processing, structure, and property relationships of thin films and coatings, and on surface cleaning and modification.

LOW TEMPERATURE PLASMA; PLASMA ENHANCED CVD; SPUTTER ETCHING. Expert's work in films and coatings has primarily utilized plasmas or glow discharges to etch, deposit, or modify films or coatings. These efforts have concentrated on understanding how plasma parameters (power, pressure, frequency) control film etch or deposition rates, film properties (especially electrical, chemical, and physical), structure, etch profiles, and selectivity. The use of high density plasma sources for film processing are also being explored.

MICROELECTRONIC THIN FILMS APPLICATIONS; SEMICONDUCTOR PROCESSING. Expert's industrial experience were in the semiconductor industry where he was responsible for research, development, and production aspects of integrated circuit fabrication. He worked on characterization of semiconductor, metal, and dielectric surfaces and interfaces by various electrical and analytical techniques. Other methods he used include oxidation, diffusion, photolithography, metallization, ion implantation, radiation damage, passivation of surfaces, plasma processes, and chemical vapor deposition.


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Expert may consult nationally and internationally, and is also local to the following cities: Atlanta, Georgia - Columbus, Georgia - Athens, Georgia - Macon, Georgia - Roswell, Georgia - Marietta, Georgia - Chattanooga, Tennessee

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Education

Year Degree Subject Institution
Year: 1973 Degree: PhD Subject: Physical Chemistry Institution: Lehigh University
Year: 1970 Degree: MS Subject: Physical Chemistry Institution: Lehigh University
Year: 1968 Degree: BS Subject: Chemistry Institution: Albright University

Work History

Years Employer Title Department Responsibilities
Years: 1997 to Present Employer: Undisclosed Title: Professor Department: Chemical Engineering Responsibilities:
Years: 1991 to 1996 Employer: Lehigh University Title: Chair Department: Chemical Engineering Responsibilities:
Years: 1978 to 1984 Employer: Lawrence Berkeley Laboratory Title: Principal Investigator Department: Materials & Molecular Research Division Responsibilities:
Years: 1977 to 1991 Employer: University of California - Berkeley Title: Professor Department: Chemical Engineering Responsibilities:
Years: 1982 to 1987 Employer: University of California - Berkeley Title: Assistant Dean of College of Chemistry Department: College of Chemistry Responsibilities:
Years: 1973 to 1977 Employer: Fairchild Camera & Instrument Corporation Title: Research Department: Process Development Responsibilities:

Career Accomplishments

Associations / Societies
Expert offers short courses for the Electrochemical Society, and the University of California Extension on plasma-enhanced etching and deposition.
Professional Appointments
Expert was an Associate Editor for the journal Chemistry of Materials from. He is a past Chairman of the San Francisco section of the Electrochemical Society, and was President of the Electrochemical Society, Inc.

Fields of Expertise

chemical vapor deposition, etching, integrated circuit, ion etching, low-temperature plasma, microelectronics thin-film application, plasma spraying, plasma-enhanced chemical vapor deposition, plastic film, semiconductor material processing, semiconductor metallizing, semiconductor passivation, thin film, thin-film application, thin-film electrical property, thin-film integrated circuit, thin-film technology, thin film science, passivation, semiconductor industry chemical, polymer thin film, plasma deposition system, plasma damage, integrated-circuit manufacturing, photoresist ashing, photoresist stripping, low-pressure chemical vapor deposition, metal surface, semiconductor etching, silicon processing, semiconductor wafer processing, semiconductor wafer etching, plasma etching technology process development, semiconductor technology, semiconductor integrated processing, thin-film processing, microfabrication plasma etching, semiconductor wafer cleaning, semiconductor device manufacturing, energy conversion, reactive ion etching, ion implantation, chemical etching, plasma cleaning, plasma surface treatment, plasma polymerization, X-ray photoelectron spectroscopy, microelectronics science, thin-film optical property, thin-film analysis, thin-film property, gas plasma, X-ray diffraction analysis, vapor deposition, thin-film circuit, semiconductor thermal oxidation, tantalum, surface analysis, sputter deposition, semiconductor material, plasma-aided manufacturing, plasma etching, photoresist, metal passivation, non-crystalline structure, microlithography, material analysis, electron microscopy, solid electric property, solid-dielectric property, dielectric material, dielectric film, Auger electron spectroscopy

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