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Plasma Processing
Expert is a recognized expert in plasma etching as encountered in microstructure fabrication (e.g., integrated circuits) and for over 30 years has been teaching a two-day technical training course entitled "Plama Etching and Reactive Ion Etching." He was employed at…
Plasma-Aided Manufacturing
Expert has been involved in the development of a number of features for these devices. These include the dual cell, programmed swept radio frequency excitation, external ion injection, and mass separation. He has also been able to utilize this concept…