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Semiconductor Back End of Line Processes, Process and Thin Films Characterization, Film Stresses and Reliability. PVD, ALD, CVD, HiPIMS
Back-End-of Line (BEOL) Integration in SRAM, Spin-Torque, Resistive Random Access Memory. PVD, CVD and ALD thin film deposition. Film micro-structure and properties. Stress-related problems in BEOL. DC, RF and HiPIMS sputter deposition. Arc evaporation. Plasma-Surface interactions. 13 years academic experience…
Carbides, Nitrides, SiAlON, Powder Synthesis & Processing, Ceramics Development & Fabrication
Technology: R&D + Engineering, Advanced Ceramics and Materials; Powders and Parts; Synthesis – processing – handling - transfer – ready-to-press feedstock – fabrication of parts – consolidation - finish - marketing. Development, processing and fabrication of fine and ultra fine…
IC, Nano, MEMS, Solar, Photovoltaic, Optical Process, Device, Equipment & Technology Development
Atomic Layer Deposition (ALD): Helped Applied Materials develop and improve an ALD deposition system by effecting parametric and design changes and cost effectively improving the ALD film analysis in 9 weeks. Developed patented metalnitride barrier layer technology. Integrated ALD into…
Thermal Processing of Advanced Materials.
He has extensive experience with the removal of binder systems from ceramic systems during post-processing, including safety, code compliance and practical aspects. Binders worked with range from "classic" organic binders to "catalytic" binders (e.g. BASF Catamold). He designed, sold, engineered…
Semiconductor Materials Characterization Thin Film Deposition
He has extensive experience, over 20 yrs, in the field of epitaxial deposition of III-V semiconductor materials for opto-electronic devices (InGaAsP/InGaAlAs/InP and AlGaAs/InGaP/GaAs based materials). This includes the growth of high-speed bipolar transitors, phototransistors, lasers, pin and avalanche high-speed photodetectors.…
Technology Commercialization, Business Development, Material Science, Photonics, Business Incubation
In 2006 expert was promoted to Director of Business Incubation at Boston University. He was responsible for incubating new technology companies originating from all disciplines at BU and other major research institutions in the region. In a period of four…