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Semiconductor Back End of Line Processes, Process and Thin Films Characterization, Film Stresses and Reliability. PVD, ALD, CVD, HiPIMS
Back-End-of Line (BEOL) Integration in SRAM, Spin-Torque, Resistive Random Access Memory. PVD, CVD and ALD thin film deposition. Film micro-structure and properties. Stress-related problems in BEOL. DC, RF and HiPIMS sputter deposition. Arc evaporation. Plasma-Surface interactions. 13 years academic experience…
Magnetron Cathode Design, Magnetic Field Modeling, PVD, Sputtering, Ion Beam Etch, Vacuum Technology
Expert has developed and supported production thin film sputtering systems and processes since 1989. He has led the development and deployment of a production PVD cluster tool used by the IC, MEMS, and magnetic memory industries. He developed one of…
Novel Display Technology; Functional Materials; Organic, Printed and Large Area Electronics
Expert has worked for over 20 years in industrial R&D on a variety of advanced functional materials primarily for photonics and electronics applications. After several years of work in vertically nanostructured Langmuir-Blodgett films for nonlinear optics, he was an initiator…
Semiconductor Transistor & BEOL Technology (Logic,Memory,CIS,Power device) & Photovoltaic Technology
Expert is an expert in the Chemical Vapor Deposition (CVD) and Chemical Vapor Deposition Reactor design areas. His PhD work was on Metal Organic Chemical Vapor Deposition of GaAs, which involved the design and construction of an Atmospheric Pressure Chemical…
Surface Engineering, Diamond like hard coating, material science, Medical device, hard disk
Most of Expert's scientific career has been devoted to the development of surface modification and thin film deposition technologies, including plasma nitriding, plasma carbonization, boriding, chromizing, cathodic arc, filtered cathodic arc, pulsed laser ablation, magnetron sputtering, pulsed mid-frequency dc magnetron…
Shape Memory Alloys, Piezoelectric Materials, Magnetostrictive Materials, Composites
Expert’s research interests focus on developing and understanding the combined electro-magneto-thermo-mechanical response of active material systems (smart structures). He is the founder of an active materials laboratory at his current university. Expert has over 15 years of experience researching and…
Technology Commercialization, Business Development, Material Science, Photonics, Business Incubation
In 2006 expert was promoted to Director of Business Incubation at Boston University. He was responsible for incubating new technology companies originating from all disciplines at BU and other major research institutions in the region. In a period of four…
Electronic Reliability & On-Chip ESD Protection
Expert currently works on predicting the electric breakdown of silicon dioxide gate dielectric. He is knowledgeable of the electric breakdown characteristics of silicon and air. Additionally, he has studied the effects of electric field on the reliability of semiconductor devices.…
Semiconductor Devices, Testing and Product Engineering, Marketing and Administration
Expert has spent most of his career in the semiconductor device and process technology areas. His experience is wide, with exposure to germanium and silicon discrete to large scale silicon integrated devices in the sub-micron regime. An area that is…
Sol-Gel Processing
The overall focus of Expert's activities is the synthesis and processing of ceramics and glasses using the sol-gel process. She edited the first volume on the applications of this process, which established the technological basis for further developments. She also…